Design and Analysis of Thermal Expansion in different Geometries for MEMS Actuators
نویسندگان
چکیده
A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion. In this paper we have studied the thermal expansion of different shapes of thermal actuator and implemented using COMSOL tool.Different shapes are designed and analyzed.Rectangular, triangular and U shaped actuator is designed and implemented.
منابع مشابه
A Thermally Actuated Polymer Micro Robotic Gripper for Manipulation of Biological Cells
The development of a novel polymer-based micro robotic gripper that can be actuated in a liquid medium is presented in this paper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by poly-para-xylylene C (parylene C) polymer layers. Due to the large difference of thermal expansion coefficients of the different layers, the actuator can ...
متن کاملDesign and Analysis of a MEMS Variable Capacitor using Thermal Actuators Diseño y Análisis de un Capacitor Variable MEMS utilizando Actuadores Térmicos
We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitor is composed by two main components: 1) the capacitor built by two squared plates, which one plate is mechanically fixed to the substrate and the other is a moving plate having mechanical suspensions (springs) connected from each corner of it to the substrate, and 2) a set of ther...
متن کاملDesign of Vertical-Lateral Thermal Actuators for MEMS
This paper focuses on the design of compact thermal actuators capable of both lateral and vertical actuation. Several different approaches to vertical and lateral actuation were combined to design a device capable of both vertical and lateral deflection. This paper presents suggested test structures and experiments and expected results for such a device.
متن کاملTemperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon
MEMS thermal actuators have been employed in a broad range of applications, often operating in different environments (e.g. vacuum, air or liquid). Since the involved heat dissipation mechanisms are different in different operating environments, the device performances are expected to be different. In this paper, we report experimental measurement and multiphysics modeling of device performance...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کامل